Femtosecond micromachining in transparent bulk materials using an anamorphic lens
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چکیده
منابع مشابه
Femtosecond micromachining in transparent bulk materials using an anamorphic lens.
A unique anamorphic lens design was applied to a circular 780nm femtosecond laser pulse to transform it into an elliptically shaped beam at focus. This lens was developed to give an alternative method of micromachining bulk transparent materials. The challenge for femtosecond laser processing is to control the nonlinear affect of self-focusing, which can occur when using a fast f-number lens. O...
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Femtosecond-lasers represent a source for electric field pulses which can have field intensities approaching and even exceeding the atomic binding field. For an electric field of this order, the polarization response of the medium changes from linear to nonlinear. In transparent media, depending on the field intensity, the laser pulse is either nonlinearly absorbed or, at lower field intensitie...
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Temporal focusing of spatially chirped femtosecond laser pulses overcomes previous limitations for ablating high aspect ratio features with low numerical aperture (NA) beams. Simultaneous spatial and temporal focusing reduces nonlinear interactions, such as self-focusing, prior to the focal plane so that deep (approximately 1 mm) features with parallel sidewalls are ablated at high material rem...
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Bulk silicon etching techniques, used to selectively remove silicon from substrates, have been broadly applied in the fabrication of micromachined sensors, actuators, and structures. Despite the more recent emergence of higher resolution, surfacemicromachining approaches, the majority of currently shipping silicon sensors are made using bulk etching. Particularly in light of newly introduced dr...
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ژورنال
عنوان ژورنال: Optics Express
سال: 2007
ISSN: 1094-4087
DOI: 10.1364/oe.15.013139